Internal Stress for Sputtered Sendust Films.
نویسندگان
چکیده
منابع مشابه
Correlation between crystalline structure and soft magnetic properties in sputtered sendust films
We have investigated the change in crystallographic and magnetic properties of sendust thin films before/after annealing. Films were deposited by both rf diode and rf magnetron sputtering. rf diode-sputtered films did not possess soft magnetic properties in the as-deposited state. Films were subsequently annealed in both a conventional oven and a rapid thermal annealing ~RTA! system. The coerci...
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ژورنال
عنوان ژورنال: Journal of the Magnetics Society of Japan
سال: 1992
ISSN: 0285-0192
DOI: 10.3379/jmsjmag.16.243